Set Point 별 Lateral Sensitivity & Noise 측정

PowerScript
main 0 files
Set Point 별 …..js
Set Point 별 …..js 2112 bytes
// 하는 거
// Set point (nN) 별로 Lateral Sensitivity와 Zeroscan 측정 (+ Lift 상태)

// 사용 전 해야할 것
// 1. sp (set point list), baseDir (저장경로) 변경
// 2. Lift 상태에서 시작할 것 (incremental 이라서 조금만 띄워두기)
// 3. SmartScan 채널 설정하기 (추천: A-B, C-D, Z Height, Z Drive, X/Y Detector)
// 4. (선택) SmartScan 에서 Repeat 옵션 원하는 만큼 켜두기 (스크립트는 조건 별로 1회만 측정)

sp = [2000, 2500, 3000]
baseDir = 'D:/SpmData/20250409_Lateral Noise/50um Scanner/'

d = { 'baseDir': baseDir, 'fileName': 'NA' }
g_sens = { 'pixelWidth': 512, 'pixelHeight': 64,  'width': 0.003, 'height': 0 }
g_zero = { 'pixelWidth': 512, 'pixelHeight': 64,  'width': 0, 'height': 0 }
o_sens = { 'overScan': {'enabled': true, 'percent': 5} }
o_zero = { 'overScan': {'enabled': false, 'percent': 0} }

function setParameters (measType) {
	spm.zservo.setpoint.value = 1000
	
	if(measType == 'sensitivity') {
		spm.scan.setScanGeometry(g_sens)
		spm.scan.rate = 4.0
		spm.zservo.gain = 1.0
		spm.scan.options = o_sens
	
		spm.xyservo.mode = 'on'
		spm.sleep(300)		
	} else {
		spm.scan.setScanGeometry(g_zero)
		spm.scan.rate = 2.0
		spm.zservo.gain = 0.5
		spm.scan.options = o_zero
	
		spm.xyservo.mode = 'off'
		spm.sleep(300)
	}

}

setParameters('sensitivity')

spm.approach.start('inc')
spm.sleep(1000)

for(i = 0; i < sp.length; i++){
	spm.zservo.setpoint.value = sp[i]
	
	//Sensitivity
	d['baseDir'] = baseDir + sp[i] + '/' + 'Sensitivity'
	d['fileName'] = 'Sensitivity'

	spm.dataLocation = d

	spm.scan.startImageScan()
	spm.sleep(1000)
}

spm.zstage.move(100)
spm.sleep(300)

setParameters('zeroscan')

spm.approach.start('inc')
spm.sleep(1000)

for(i = 0; i < sp.length; i++){
	spm.zservo.setpoint.value = sp[i]

	//ZeroScan
	d['baseDir'] = baseDir + sp[i] + '/' + 'Zeroscan'
	d['fileName'] = 'Zeroscan'

	spm.dataLocation = d

	spm.scan.startImageScan()
	spm.sleep(1000)
}

spm.zstage.move(1000)

spm.zservo.enable = false
spm.sleep(300)
spm.zscanner.moveTo(0)
spm.sleep(300)

d['baseDir'] = baseDir + 'Lift/' + 'Zeroscan'

spm.dataLocation = d

spm.scan.startImageScan()
spm.sleep(1000)
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Snippet Information
Author: daeyeon.won
Language: PowerScript
Created: Oct 23, 2025
Updated: 0 minutes ago
Views: 23
Stars: 2