NX10 XY stage test
PowerScript
장비 생산 시 NX10 XY Stage의 구동 이상 여부를 확인할 때 사용되는 코드입니다.
main
0 files
NX10 XY stage …..js
NX10 XY stage …..js
5848 bytes
//NX10 XY stage test
spm.xystage.reset();
spm.xystage.moveTo(0, 0, 1, 1);
print("P01_X (0) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, 0, 1, 1);
print("P02_X (2800) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, 2800, 1, 1);
print("P03_X (2800) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(0, 2800, 1, 1);
print("P04_X (0) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, 2800, 1, 1);
print("P05_X (-2800) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, 0, 1, 1);
print("P06_X (-2800) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, -2800, 1, 1);
print("P07_X (-2800) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(0, -2800, 1, 1);
print("P08_X (0) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, -2800, 1, 1);
print("P09_X (2800) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, -2800, 1, 1);
print("P10_X (5600) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, 0, 1, 1);
print("P11_X (5600) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, 2800, 1, 1);
print("P12_X (5600) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, 5600, 1, 1);
print("P13_X (5600) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, 5600, 1, 1);
print("P14_X (2800) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(0, 5600, 1, 1);
print("P15_X (0) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, 5600, 1, 1);
print("P16_X (-2800) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, 5600, 1, 1);
print("P17_X (-5600) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, 2800, 1, 1);
print("P18_X (-5600) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, 0, 1, 1);
print("P19_X (-5600) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, -2800, 1, 1);
print("P20_X (-5600) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, -5600, 1, 1);
print("P21_X (-5600) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, -5600, 1, 1);
print("P22_X (-2800) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(0, -5600, 1, 1);
print("P23_X (0) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, -5600, 1, 1);
print("P24_X (2800) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, -5600, 1, 1);
print("P25_X (5600) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, -5600, 1, 1);
print("P26_X (8400) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, -2800, 1, 1);
print("P27_X (8400) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, 0, 1, 1);
print("P28_X (8400) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, 2800, 1, 1);
print("P29_X (8400) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, 5600, 1, 1);
print("P30_X (8400) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, 8400, 1, 1);
print("P31_X (8400) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, 8400, 1, 1);
print("P32_X (5600) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, 8400, 1, 1);
print("P33_X (2800) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(0, 8400, 1, 1);
print("P34_X (0) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, 8400, 1, 1);
print("P35_X (-2800) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, 8400, 1, 1);
print("P36_X (-5600) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, 8400, 1, 1);
print("P37_X (-8400) : "+spm.xystage.pos.x+", Y (8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, 5600, 1, 1);
print("P38_X (-8400) : "+spm.xystage.pos.x+", Y (5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, 2800, 1, 1);
print("P39_X (-8400) : "+spm.xystage.pos.x+", Y (2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, 0, 1, 1);
print("P40_X (-8400) : "+spm.xystage.pos.x+", Y (0) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, -2800, 1, 1);
print("P41_X (-8400) : "+spm.xystage.pos.x+", Y (-2800) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, -5600, 1, 1);
print("P42_X (-8400) : "+spm.xystage.pos.x+", Y (-5600) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-8400, -8400, 1, 1);
print("P43_X (-8400) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-5600, -8400, 1, 1);
print("P44_X (-5600) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(-2800, -8400, 1, 1);
print("P45_X (-2800) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(0, -8400, 1, 1);
print("P46_X (0) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(2800, -8400, 1, 1);
print("P47_X (2800) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(5600, -8400, 1, 1);
print("P48_X (5600) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.moveTo(8400, -8400, 1, 1);
print("P49_X (8400) : "+spm.xystage.pos.x+", Y (-8400) : "+spm.xystage.pos.y);
spm.xystage.reset();
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Snippet Information
Author:
Youngseo.Park
Language: PowerScript
Created:
Oct 28, 2025
Updated:
0 minutes ago
Views: 34
Stars: 2