Focus Stage Straightness test

PowerScript

FX 장비 생산 시 Focus stage의 Straightness를 확인하는 데 사용되는 script입니다.

main 0 files
Focus Stage Straightness …..js
Focus Stage Straightness …..js 1087 bytes
baseDir = 'C:/Users/admin/Desktop/OXY Test/2/'

classification = 'F_'

initialFocusPos = 41000
initialZPos = 20000

distance = -100

for(i = 0; i < 3; i++) {
	
	var testNum = i + 1
	
	spm.zstage.moveTo(initialZPos)	
	
	spm.focusstage.reset()
	
	spm.focusstage.moveTo(initialFocusPos)
	
	path = baseDir + classification + 'testNum_' + testNum +'.txt'
	print(path)
	
	app.setLogFile(path)
	app.setLogFileEnabled(true)

	print('a')

	spm.addChannel('A-B')
	spm.addChannel('lfm')
	spm.addChannel('Intensity')

	for(j = 0; j < 200; j++) {
		
		ab = spm.readChannelAveraged('a-b', 10, 10)
		cd = spm.readChannelAveraged('lfm', 10, 10)
		intensity = spm.readChannelAveraged('intensity', 10, 10)
		f = parseInt(spm.focusstage.pos)

		print(ab, cd, intensity, f)

		spm.focusstage.move(distance)	
	}

	ab = spm.readChannelAveraged('a-b', 10, 10)
	cd = spm.readChannelAveraged('lfm', 10, 10)
	intensity = spm.readChannelAveraged('intensity', 10, 10)
	f = parseInt(spm.focusstage.pos)

	print(ab, cd, intensity, f)

	app.setLogFileEnabled(false)
}
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Snippet Information
Author: Youngseo.Park
Language: PowerScript
Created: Oct 29, 2025
Updated: 0 minutes ago
Views: 41
Stars: 2