Focus Stage Straightness test
PowerScript
FX 장비 생산 시 Focus stage의 Straightness를 확인하는 데 사용되는 script입니다.
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0 files
Focus Stage Straightness …..js
Focus Stage Straightness …..js
1087 bytes
baseDir = 'C:/Users/admin/Desktop/OXY Test/2/'
classification = 'F_'
initialFocusPos = 41000
initialZPos = 20000
distance = -100
for(i = 0; i < 3; i++) {
var testNum = i + 1
spm.zstage.moveTo(initialZPos)
spm.focusstage.reset()
spm.focusstage.moveTo(initialFocusPos)
path = baseDir + classification + 'testNum_' + testNum +'.txt'
print(path)
app.setLogFile(path)
app.setLogFileEnabled(true)
print('a')
spm.addChannel('A-B')
spm.addChannel('lfm')
spm.addChannel('Intensity')
for(j = 0; j < 200; j++) {
ab = spm.readChannelAveraged('a-b', 10, 10)
cd = spm.readChannelAveraged('lfm', 10, 10)
intensity = spm.readChannelAveraged('intensity', 10, 10)
f = parseInt(spm.focusstage.pos)
print(ab, cd, intensity, f)
spm.focusstage.move(distance)
}
ab = spm.readChannelAveraged('a-b', 10, 10)
cd = spm.readChannelAveraged('lfm', 10, 10)
intensity = spm.readChannelAveraged('intensity', 10, 10)
f = parseInt(spm.focusstage.pos)
print(ab, cd, intensity, f)
app.setLogFileEnabled(false)
}
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Snippet Information
Author:
Youngseo.Park
Language: PowerScript
Created:
Oct 29, 2025
Updated:
0 minutes ago
Views: 41
Stars: 2