Code

Z Stage Straightness test

FX 장비 생산 시 Z stage의 Straightness를 확인하는 데 사용되는 script입니다.

baseDir = 'C:/Users/admin/Desktop/OXY Test/1/' classification = 'Z_' initialFocusPos = 41000 …
image scan (NCM)

Code implemented to operate according to the sequence for acquiring NCM images. Default parameters are …

from time import sleep from glob import glob from json …
SHR-100 (Cabliration용 sample) 표면 검수용 code

2D Pattern sample 표면 검수 및 이미지 촬영 시 활용됩니다.

//File path can be changed. visionLoc="D:/SpmData/vision capture/" //capture 7th line …
SHR-100 (Calibration용 Sample) 표면 검수용 code

SHR-100의 Y Pattern 검수용 code입니다.

//File path can be changed. visionLoc="D:/SpmData/vision capture/" //capture 4th line …
SHR-100 (calibration용 sample) X pattern 표면 검수용 code

SHR-100 표면 검수 시 사용하는 code입니다. 그 중 X pattern 이미지 측정 코드입니다.

//File path can be changed. visionLoc="D:/SpmData/vision capture/" //mount sample on …
NX10 XY stage test

장비 생산 시 NX10 XY Stage의 구동 이상 여부를 확인할 때 사용되는 코드입니다.

//NX10 XY stage test spm.xystage.reset(); spm.xystage.moveTo(0, 0, 1, 1); print("P01_X …
Focus Stage repeat test 시 사용 code

장비 생산 시 Focus Stage를 20회 반복 구동하며 모터 등 구조물의 이상을 파악하는데 사용됩니다. 같은 …

var speed = 1.0; var maxCount = 20; var distance …
Scanning images beyond the XY scanner’s range

Acquire images over a range larger than the XY scanner range by moving the XY …

var xyStageMove = { mov1: [100, 0], mov2: [0, -100], …
Array

Basic Syntax

// Array Creation var array1 = new Array(5); var array2 …
Sample Vision Capture

Sample Vision capture to find specific position

LeftTopX = -248 LeftTopY = 1915 RightBottomX = 1632 RightBottomY …
Loop structure

Basic Syntax

// for for(var i = 0; i <= 10; i++){ …
Move the XY stage after the Image Scan.

Retract the Z scanner to safely move the XY stage after image scanning.

function scanAndMoveXYstage(moveX, moveY){ spm.scan.startImageScan(); spm.scan.stop(); spm.zscanner.retractAll(); spm.sleep(50); spm.xystage.move(moveX, moveY, 0.1, …
Control Head mode

[set] Head Mode Change SLD On/Off [get] sld on/off mode type pspd align [dependency] - …

from SmartRemote import SmartRemote class HeadMode: def __init__(self, SR:SmartRemote): self.__sr …
Image Acquisition Code for Cantilever Training Model

Sample: The specimen to be measured (if too close, sample color may mix with the …

import numpy as np from SmartRemote import SmartRemote as SR …
Flatten the grating sample

Code that uses K-Means clustering to split the Top and Bottom regions and performs line …

import os import warnings import numpy as np import matplotlib.pyplot …
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